NSF Center
for Nano and Micro-
contamination Control

Egan Research Center

Northeastern University
360 Huntington Avenue
Boston, MA 02115

phone: 617.373.6012
fax: 617.373.3266

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5th Surface Cleaning Workshop

Future and Current Challenges in Surface Cleaning

November 13-14, 2007, Boston, MA

Workshop: November 13-14, 2007, Colonnade Hotel, Boston
Evening Reception: November 13, 2007, Northeastern University

Organized by: Northeastern University and Hanyang University.

Sponsored by: Entegris, SACHEM Inc., NANO-MASTER Inc., UV Tech Systems, Solid State Equipment Corporation, Scientific Gear L.L.C., DuPont/EKC Technology, Mattson.

The workshop will give end-users, researchers, and suppliers a forum to discuss new technologies, solutions and limitations in meeting surface cleaning needs for the year 2007 and beyond. The agenda will feature speakers from SEZ, Sony, Northeastern University, DuPont/EKC Technology, Entegris, University of North Texas, Texas A&M University, Hanyang University, KLA-Tencor Corp, SACHEM, Sematech, and Purdue University. Follow the link to view the confirmed speakers and presentations.

Workshop Agenda

Workshop Proceedings