360 Huntington Avenue
Boston, MA 02115
The Center for Nano and Microcontamination Control (CMC) at Northeastern University began operations in August 2002.
The CMC addresses particulate and chemical contamination and defects that directly affect semiconductor fabrication. Contamination is an issue because aggressive miniaturization is reducing feature sizes to less than 35 nm. Contamination also affects MEMS and NEMS devices with micro and nanoscale channels, and hard disk head fabrication.
In partnership with industry, the CMC's goal is to develop state of the art techniques for micro and nanoscale contaminant control, mitigation, removal and characterization in manufacturing and fabrication processes. For example, the Center developed two metrology techniques for nanoparticles, and novel techniques for removing nanoparticles from surfaces and nanoscale trenches.
The CMC's ongoing research and industrial collaboration provides understanding of contaminant transport on the micro and nano scale and explores the limitations and promise of contaminant control in nanoscale structures. The Center also offers customized educational programs to industry in terms of tutorials and workshops that are well attended by companies active in the area of contamination control.
For news updates and upcoming events, please visit the website of Northeastern's Center for High-rate Nanomanufacturing.
Visit the CHN Website