360 Huntington Avenue
Boston, MA 02115
The facility includes a 10,000 square foot cleanroom. Our facility includes a complete six-inch wafer fabrication facility including bulk micromachining, metal surface micromachining and E-beam lithography. It also has a CMP tool (with end point detection), laser surface scanner, Laser airborne and liquid counter (200 nm resolution), CNC particle counters (10 nm resolution), Zeta potential measurement down to 1 nm particles, several cleaning tools, Atomic Force Microscope in addition to optical and FESEM.