NSF Center
for Nano and Micro-
contamination Control

Egan Research Center

Northeastern University
360 Huntington Avenue
Boston, MA 02115

phone: 617.373.6012
fax: 617.373.3266

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Facilities

Our Facilities: The George J. Kostas Nanoscale Technology and Manufacturing Research Center at Northeastern University

The facility includes a 10,000 square foot cleanroom. Our facility includes a complete six-inch wafer fabrication facility including bulk micromachining, metal surface micromachining and E-beam lithography. It also has a CMP tool (with end point detection), laser surface scanner, Laser airborne and liquid counter (200 nm resolution), CNC particle counters (10 nm resolution), Zeta potential measurement down to 1 nm particles, several cleaning tools, Atomic Force Microscope in addition to optical and FESEM.